@inproceedings{af14088e23cb4bb6b08ca016bc403566,
title = "Silicon nitride fibers using micro fabrication methods",
author = "Jari Koskinen and H.H. Johnson",
year = "1989",
doi = "10.1557/PROC-130-63",
language = "English",
volume = "130",
series = "MRS Proceedings",
pages = "63--68",
editor = "D.M. Barnett and J.C. Bravman and D.A. Smith",
booktitle = "Materials Research Society Symposium Proceedings",
note = "Materials Research Society Fall Meeting : Symposium C – Thin Films: Stresses and Mechanical Properties I, MRS ; Conference date: 01-01-1988 Through 01-01-1988",
}