Silicon nanostructure fabrication by direct FIB writing and TMAH wet chemical etching

Päivi Sievilä, Nikolai Chekurov, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationNanotech&Expo, Anaheim, CA, USA 21-24 June
Pages214-217
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication

Keywords

  • FIB implantation
  • nanofanrication
  • silicon
  • TMAH
  • wet chemical etching

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