Silicon Nanopillars Formed by Reactive Ion Etching Using Self-Organized Gold Mask

V. Ovchinnikov, A. Malinin, S. Novikov, C. Tuovinen

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageEnglish
Pages (from-to)263-265
JournalPhysica Scripta
VolumeT79
Publication statusPublished - 1999
MoE publication typeA1 Journal article-refereed

Keywords

  • Gold Mask
  • Nanopillars
  • RIE
  • Silicon

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