Original language | English |
---|---|
Title of host publication | Suomen Kemian Seura, Kemian päivät 2002 |
Pages | 26-27 |
Publication status | Published - 2002 |
MoE publication type | A4 Conference publication |
Keywords
- BioMEMES
- chemical microsystems
- silicon
Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
Original language | English |
---|---|
Title of host publication | Suomen Kemian Seura, Kemian päivät 2002 |
Pages | 26-27 |
Publication status | Published - 2002 |
MoE publication type | A4 Conference publication |