Shock Impact Reliability and Failure Analysis of a Three-Axis MEMS Gyroscope

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Original languageEnglish
Pages (from-to)347-355
JournalJournal of Microelectromechanical Systems
Volume23
Issue number2
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

    Research areas

  • finite element analysis, gyroscope, MEMS, reliability, shock impact

ID: 966027