Shock Impact Reliability and Failure Analysis of a Three-Axis MEMS Gyroscope

Jue Li, Mikael Broas, Joonas Makkonen, Toni T. Mattila, Jussi Hokka, Mervi Paulasto-Kröckel

Research output: Contribution to journalArticleScientificpeer-review

28 Citations (Scopus)
Original languageEnglish
Pages (from-to)347-355
JournalJournal of Microelectromechanical Systems
Volume23
Issue number2
DOIs
Publication statusPublished - 2014
MoE publication typeA1 Journal article-refereed

Keywords

  • finite element analysis
  • gyroscope
  • MEMS
  • reliability
  • shock impact

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