Sensitivity of Al2O3 Passivation on the Surface Condition Prior to the ALD Process

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Original languageEnglish
Title of host publication28th European Photovoltais Specialists conference EU PVSEC, Paris, France, September 30 -October 4, 2013
Publication statusPublished - 2013
MoE publication typeB3 Non-refereed article in conference proceedings

ID: 660100