Sensitivity of Al2O3 Passivation on the Surface Condition Prior to the ALD Process

Shuo Li, Päivikki Repo, Guillaume von Gastrow, Yameng Bao, Hele Savin

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Original languageEnglish
Title of host publication28th European Photovoltais Specialists conference EU PVSEC, Paris, France, September 30 -October 4, 2013
Publication statusPublished - 2013
MoE publication typeB3 Non-refereed article in conference proceedings

Cite this

Li, S., Repo, P., von Gastrow, G., Bao, Y., & Savin, H. (2013). Sensitivity of Al2O3 Passivation on the Surface Condition Prior to the ALD Process. In 28th European Photovoltais Specialists conference EU PVSEC, Paris, France, September 30 -October 4, 2013