Sensitive copper detection in p-type CZ-silicon using µ-PCD

Hele Väinölä, Marko Yli-Koski, Antti Haarahiltunen, Juha Sinkkonen

Research output: Contribution to journalArticleScientificpeer-review

30 Citations (Scopus)
Original languageEnglish
Pages (from-to)pp. G790-G794
JournalJournal of the Electrochemical Society
Volume150
Issue number12
Publication statusPublished - 2003
MoE publication typeA1 Journal article-refereed

Keywords

  • copper
  • lifetime
  • oxygen precipitates
  • PCD
  • silicon

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