Sensitive copper detection in p-type CZ-silicon by µPCD

Hele Väinölä, Marko Yli-Koski, Antti Haarahiltunen, Juha Sinkkonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publication202nd Meeting of the Electrochemical Society, Salt Lake City UT, USA, Oct. 20.-24.2002
EditorsC.L. Claeys, M. Watanabe, P. Stallhofer Rai-Choudhury
Place of PublicationPennington, NI
Pages249-255
Publication statusPublished - 2002
MoE publication typeA4 Article in a conference publication

Keywords

  • copper
  • detection
  • lifetime
  • precipitation
  • silicon

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