| Original language | English |
|---|---|
| Patent number | US10950737 |
| Priority date | 16/03/2021 |
| Filing date | 13/02/2018 |
| Publication status | Published - 16 Mar 2021 |
| MoE publication type | H1 Granted patent |
Semiconductor structures and manufacturing the same
Hele Savin (Inventor), Ville Vähänissi (Inventor), Mikko Juntunen (Inventor), Juha Heinonen (Inventor)
Research output: Patent