Self-alignment in the stacking of microchips with mist-induced water droplets

Bo Chang, Veikko Sariola, Mirva Jääskeläinen, Quan Zhou

Research output: Contribution to journalArticleScientificpeer-review

24 Citations (Scopus)
Original languageEnglish
Pages (from-to)11
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number1
DOIs
Publication statusPublished - 2011
MoE publication typeA1 Journal article-refereed

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