Selective surface patterning with electric discharge

  • N. Suni
  • , M. Haapala
  • , A. Mäkinen
  • , L. Sainiemi
  • , S. Franssila
  • , E. Färm
  • , E. Puukilainen
  • , M. Ritala
  • , Jari Yli-Kauhaluoma
  • , R. Kostiainen

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2008
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameHelsinki Drug Research Conference, June 9-11

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