Section topographic study of wet-sand blasted Czochralski wafers

T. Tuomi, J. Partanen, J. Lahtinen, N. Henelius, J. Laakkonen, M. Tilli

Research output: Working paper › Professional

Original language	English
Place of Publication	Espoo
Publication status	Published - 1992
MoE publication type	D4 Published development or research report or study

Name	Optoelectronics Laboratory, Helsinki University of Technology
No.	TKK-F-C139

Keywords

@techreport{1b465d8cb893467293bf12ee6f753df1,

title = "Section topographic study of wet-sand blasted Czochralski wafers",

keywords = "silicon, synchrotron X-ray topography, silicon, synchrotron X-ray topography, silicon, synchrotron X-ray topography",

author = "T. Tuomi and J. Partanen and J. Lahtinen and N. Henelius and J. Laakkonen and M. Tilli",

year = "1992",

language = "English",

series = "Optoelectronics Laboratory, Helsinki University of Technology",

number = "TKK-F-C139",

type = "WorkingPaper",

}

TY - UNPB

T1 - Section topographic study of wet-sand blasted Czochralski wafers

AU - Tuomi, T.

AU - Partanen, J.

AU - Lahtinen, J.

AU - Henelius, N.

AU - Laakkonen, J.

AU - Tilli, M.

PY - 1992

Y1 - 1992

KW - silicon

KW - synchrotron X-ray topography

KW - silicon

KW - synchrotron X-ray topography

KW - silicon

KW - synchrotron X-ray topography

M3 - Working paper

T3 - Optoelectronics Laboratory, Helsinki University of Technology

BT - Section topographic study of wet-sand blasted Czochralski wafers

CY - Espoo

ER -