Scanning heterodyne laser interferometer for phase-sensitive absolute-amplitude measurements of surface vibrations

Kimmo Kokkonen, Matti Kaivola

Research output: Contribution to journalArticleScientificpeer-review

71 Citations (Scopus)
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Abstract

We describe a scanning heterodyne interferometer for imaging surface vibrations with a wide frequency range, with current electronics, up to 6GHz. The heterodyne operation facilitates measurement of absolute amplitude and phase of the surface vibration without calibration. Currently, the setup allows detection of vibration amplitudes down to ∼1pm with a lateral resolution of <1μm. The interferometer is designed to accommodate the different sample types, e.g., surface and bulk acoustic wave devices and micromechanical resonators. The absolute-amplitude and phase information allows for a thorough characterization of surface vibrations in such components and provides direct information of the vibration fields not obtainable via electrical measurements.
Original languageEnglish
Article number063502
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume92
Issue number6
DOIs
Publication statusPublished - 2008
MoE publication typeA1 Journal article-refereed

Keywords

  • Interferometry
  • surface vibrations

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