Scandium dipivaloyl methanate as a volatile precursors for thin film deposition, Coupling of mass spectrometer to thermobalance

Katalin Mészaros-Szécsényi, Jani Päiväsaari, Matti Putkonen, György Pokol, Lauri Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    12 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)65-75
    JournalJournal of Thermal Analysis and Calorimetry
    Volume69
    Publication statusPublished - 2002
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ALD
    • TG-MS
    • thin film

    Cite this