Scaling of piezoelectric in-plane NEMS : Towards nanoscale integration of AlN-based transducer on vertical sidewalls

Artem Gabrelian^*, Ville Miikkulainen, Glenn Ross, Mervi Paulasto-Kröckel

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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NEMS renewal: Nanoelectromechanical systems (NEMS) renewal a novel NEMS latching switch
Ross, G. (Principal investigator) & Gabrelian, G. (Project Member)
01/09/2023 → 31/08/2027
Project: Academy of Finland: Other research funding