Scaling of piezoelectric in-plane NEMS : Towards nanoscale integration of AlN-based transducer on vertical sidewalls

Artem Gabrelian*, Ville Miikkulainen, Glenn Ross, Mervi Paulasto-Kröckel

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

1 Citation (Scopus)
32 Downloads (Pure)

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