Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels

Jihong Yim, Oili M.E. Ylivaara, Markku Ylilammi, Virpi Korpelainen, Eero Haimi, Emma Verkama, Mikko Utriainen, Riikka L. Puurunen^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Puurunen, R., Järvilehto, J., Revitzer, H., Viinikainen, T., Miikkulainen, V., Yim, J., Gonsalves, C. & Velasco Calsina, J.
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding
Renable Carbon Cycle - Uusiutuva hiilikierto: Conversion of CO2 to Fuels with Tailored Heterogeneous Catalysts
Puurunen, R., Arandia Gutierrez, A., Viinikainen, T., Yim, J., Sajid, A., Singh, A. & Revitzer, H.
01/01/2020 → 31/12/2023
Project: Academy of Finland: Other research funding