Projects per year
Abstract
Atomic layer deposition (ALD) raises global interest through its unparalleled conformality. This work describes new microscopic lateral high-aspect-ratio (LHAR) test structures for conformality analysis of ALD. The LHAR structures are made of silicon and consist of rectangular channels supported by pillars. Extreme aspect ratios even beyond 10 000 : 1 enable investigations where the adsorption front does not penetrate to the end of the channel, thus exposing the saturation profile for detailed analysis. We use the archetypical trimethylaluminum (TMA)-water ALD process to grow alumina as a test vehicle to demonstrate the applicability, repeatability and reproducibility of the saturation profile measurement and to provide a benchmark for future saturation profile studies. Through varying the TMA reaction and purge times, we obtained new information on the surface chemistry characteristics and the chemisorption kinetics of this widely studied ALD process. New saturation profile related classifications and terminology are proposed.
Original language | English |
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Pages (from-to) | 23107-23120 |
Number of pages | 14 |
Journal | Physical chemistry chemical physics : PCCP |
Volume | 22 |
Issue number | 40 |
DOIs | |
Publication status | Published - 28 Oct 2020 |
MoE publication type | A1 Journal article-refereed |
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Dive into the research topics of 'Saturation profile based conformality analysis for atomic layer deposition: aluminum oxide in lateral high-aspect-ratio channels'. Together they form a unique fingerprint.Datasets
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ALD Al2O3 thickness profile in microscopic rectangular channel, TMA-water 300 degC 500 cycles, PillarHall(TM) LHAR3-1b, V0001
Ylivaara, O. (Creator), Puurunen, R. (Creator) & Marles, J. (Creator), 31 May 2021
DOI: 10.5281/zenodo.3974438, https://zenodo.org/record/3974438
Dataset
Projects
- 2 Active
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Reactive flow in porous media: modelling and experiments in atomic layer deposition context
Puurunen, R., Gonsalves, C., Järvilehto, J., Velasco Calsina, J., Yim, J., Miikkulainen, K., Revitzer, H. & Viinikainen, T.
01/09/2020 → 31/08/2024
Project: Academy of Finland: Other research funding
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Renable Carbon Cycle - Uusiutuva hiilikierto: Conversion of CO2 to Fuels with Tailored Heterogeneous Catalysts
Puurunen, R., Arandia Gutierrez, A., Revitzer, H., Sajid, A., Singh, A., Yim, J. & Viinikainen, T.
01/01/2020 → 31/12/2023
Project: Academy of Finland: Other research funding
Equipment
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Raw Materials Research Infrastructure
Maarit Karppinen (Manager)
School of Chemical TechnologyFacility/equipment: Facility