Sacrificial layer technique for releasing metallized multilayer SU-8 devices

Anand Tatikonda, Ville P. Jokinen, Hanno Evard, Sami Franssila*

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

5 Citations (Scopus)
196 Downloads (Pure)

Fingerprint

Dive into the research topics of 'Sacrificial layer technique for releasing metallized multilayer SU-8 devices'. Together they form a unique fingerprint.

Chemistry

Physics

Material Science