Roughness scaling in titanium thin films: A three-dimensional molecular dynamics study of rotational and static glancing angle deposition

Matilda Backholm; Morten Foss; Kai Nordlund

doi:10.1016/j.apsusc.2012.12.077

Roughness scaling in titanium thin films: A three-dimensional molecular dynamics study of rotational and static glancing angle deposition

Matilda Backholm, Morten Foss, Kai Nordlund

Not published at Aalto University

Aarhus University

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Journal	Applied Surface Science
DOIs	https://doi.org/10.1016/j.apsusc.2012.12.077
Publication status	Published - 2013
MoE publication type	A1 Journal article-refereed

Access to Document

10.1016/j.apsusc.2012.12.077

Cite this

@article{8ef421a170cd44f8895e5ffb32ee56f2,

title = "Roughness scaling in titanium thin films: A three-dimensional molecular dynamics study of rotational and static glancing angle deposition",

author = "Matilda Backholm and Morten Foss and Kai Nordlund",

year = "2013",

doi = "10.1016/j.apsusc.2012.12.077",

language = "English",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

}

TY - JOUR

T1 - Roughness scaling in titanium thin films: A three-dimensional molecular dynamics study of rotational and static glancing angle deposition

AU - Backholm, Matilda

AU - Foss, Morten

AU - Nordlund, Kai

PY - 2013

Y1 - 2013

UR - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=ORCID&SrcApp=OrcidOrg&DestLinkType=FullRecord&DestApp=WOS_CPL&KeyUT=WOS:000315330300042&KeyUID=WOS:000315330300042

U2 - 10.1016/j.apsusc.2012.12.077

DO - 10.1016/j.apsusc.2012.12.077

M3 - Article

SN - 0169-4332

JO - Applied Surface Science

JF - Applied Surface Science

ER -

Roughness scaling in titanium thin films: A three-dimensional molecular dynamics study of rotational and static glancing angle deposition

Access to Document

Other files and links

Cite this