@techreport{6eadf03861234f3292f7cc7c2ed95963,
title = "Rigorous method for diffraction analysis of continuous grating profiles with deep grooves",
keywords = "diffraction gratings, diffractive optics, micro-optics, rigorous diffraction theory, diffraction gratings, diffractive optics, micro-optics, rigorous diffraction theory, diffraction gratings, diffractive optics, micro-optics, rigorous diffraction theory",
author = "I. Kallioniemi and K. Blomstedt and E. Noponen",
year = "1996",
language = "English",
series = "XXX Annual Conference of the Finnish Physical Society, Espoo, 1996.",
publisher = "Helsinki University of Technology",
pages = "5",
type = "WorkingPaper",
institution = "Helsinki University of Technology",
}