Rigorous method for diffraction analysis of continuous grating profiles with deep grooves

I. Kallioniemi, K. Blomstedt, E. Noponen

    Research output: Working paperProfessional

    Original languageEnglish
    Place of PublicationEspoo
    Publication statusPublished - 1996
    MoE publication typeD4 Published development or research report or study

    Publication series

    NameXXX Annual Conference of the Finnish Physical Society, Espoo, 1996.
    PublisherHelsinki University of Technology


    • diffraction gratings
    • diffractive optics
    • micro-optics
    • rigorous diffraction theory

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