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Raw Materials Research Infrastructure
Karppinen, M. (Manager)
School of Chemical EngineeringFacility/equipment: Facility
Review Article : Recommended reading list of early publications on atomic layer deposition - Outcome of the "Virtual Project on the History of ALD"
Esko Ahvenniemi, Andrew R. Akbashev, Saima Ali, Mikhael Bechelany, Maria Berdova, Stefan Boyadjiev, David C. Cameron, Rong Chen, Mikhail Chubarov, Veronique Cremers, Anjana Devi, Viktor Drozd, Liliya Elnikova, Gloria Gottardi, Kestutis Grigoras, Dennis M. Hausmann, Cheol Seong Hwang, Shih Hui Jen, Tanja Kallio, Jaana Kanervo
- Department of Chemistry and Materials Science
- Department of Electronics and Nanoengineering
- School of Chemical Engineering
- School of Chemical Engineering
- Department of Chemical and Metallurgical Engineering
- Department of Applied Physics
- Soft Matter and Wetting
- Harri Lipsanen Group
- Electron Physics Group (EPG)
- Stanford University
- Centre National de la Recherche Scientifique (CNRS)
- University of Twente
- Bulgarian Academy of Sciences
- Masaryk University
- Huazhong University of Science and Technology
- Ghent University
- Ruhr University Bochum
- St. Petersburg State University
- Alikhanov Institute for Theoretical and Experimental Physics
- Seoul National University
- Global Foundries, Inc.
- St. Petersburg Electrotechnical University
- Techinsights
- Ioffe Institute
- Sentech Instruments GmbH
- NovaldMedical Ltd Oy
- STMicroelectronics
- Seagate Technology
- University of Helsinki
- St. Petersburg State Institute of Technology
- Renewable Energy Development Center
- Chemnitz University of Technology
- Summa Semiconductor Oy
- Military University of Technology Warsaw
- ASELSAN Inc.
- KOBUS
- Netherlands Organisation for Applied Scientific Research
- University of Maryland, College Park
- Seitek50
- Fraunhofer Institute for Ceramic Technologies and Systems
- Lund University
- Uppsala University
- Delft University of Technology
- National Research Council of Italy
- Immanuel Kant Baltic Federal University
- Université Grenoble Alpes
- Fondazione Bruno Kessler
- VTT Technical Research Centre of Finland
- Lam Research Corporation
- Åbo Akademi University
- Massachusetts Institute of Technology
- Linköping University
- Tallinn University of Technology
- Eindhoven University of Technology
- University of Jyväskylä
- Institut de recherche et développement sur l’énergie photovoltaïque
- L’Institut Photovoltaïque d’Île-de-France
Research output: Contribution to journal › Review Article › peer-review
76
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(Scopus)
1050
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