Reliability investigation of stress-compensated metal-coated monocrystalline-silicon membranes for MEMS tuneable high-impedance surfaces

M. Sterner, D. Chicherin, A.V. Räisänen, G. Stemme, J. Oberhammer

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publicationMEMSWAVE Conference, Otranto, Italy, June 28-30, 2010
    Place of PublicationOtranto, Italy
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication

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