Reliability Assessment of MEMS Devices A Case Study of a 3 axis Gyroscope

Joonas Makkonen, Mikael Broas, Jue Li, Jussi Hokka, Toni T. Mattila, Mervi Paulasto-Kröckel

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationESTC 4th Electronic System-Integration Technology Conference, Amsterdam, The Netherlands, September 17-20, 2012
Place of PublicationHoboken, NJ
PublisherIEEE CPMT
Pages62-69
ISBN (Print)978-1-4673-4645-0
Publication statusPublished - 2012
MoE publication typeA4 Article in a conference publication

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