Refractive index of silicon with various doping levels at high temperatures

M. Shpak, Lauri Sainiemi, P. Kärhä, M. Heinonen, S. Franssila, E. Ikonen

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationNewrad 2011, Maui, Hawaii, September 18.-23, 2011
Place of PublicationMaui, Hawaii
Publication statusPublished - 2011
MoE publication typeA4 Article in a conference publication

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