Reflectometry technique for study of complex multilayer micro- and nanostructures with lateral periodicity

Aleksandr Danilenko^*, Masoud Rastgou, Farshid Manoocheri, Jussi Kinnunen, Virpi Korpelainen, Antti Lassila, Erkki Ikonen

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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PREIN 2: Photonics Research and Innovation
Naukkarinen, O. (Principal investigator)
01/09/2022 → 31/12/2026
Project: RCF Flagship