Reflectometry technique for study of complex multilayer micro- and nanostructures with lateral periodicity

Aleksandr Danilenko*, Masoud Rastgou, Farshid Manoocheri, Jussi Kinnunen, Virpi Korpelainen, Antti Lassila, Erkki Ikonen

*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

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