Reduction of threading dislocation density in A1_(0.12)Ga_(0.88)N epilayers by a multistep technique

Teemu Lang; Maxim Odnoblydov; Vladislav Bougrov; Sami Suihkonen; Olli Svensk; Pekka Törmä; Markku Sopanen; Harri Lipsanen

Reduction of threading dislocation density in A1_(0.12)Ga_(0.88)N epilayers by a multistep technique

Teemu Lang, Maxim Odnoblydov, Vladislav Bougrov, Sami Suihkonen, Olli Svensk, Pekka Törmä, Markku Sopanen, Harri Lipsanen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	276-280
Journal	Journal of Crystal Growth
Volume	298
Publication status	Published - 2007
MoE publication type	A1 Journal article-refereed

Keywords

A1GaN
MOCVD
nucleation
threading dislocations

Cite this

@article{c88b1d34bdef42c3a187ef6c605476a6,

title = "Reduction of threading dislocation density in A1_(0.12)Ga_(0.88)N epilayers by a multistep technique",

keywords = "A1GaN, MOCVD, nucleation, threading dislocations, A1GaN, MOCVD, nucleation, threading dislocations, A1GaN, MOCVD, nucleation, threading dislocations",

author = "Teemu Lang and Maxim Odnoblydov and Vladislav Bougrov and Sami Suihkonen and Olli Svensk and Pekka T{\"o}rm{\"a} and Markku Sopanen and Harri Lipsanen",

year = "2007",

language = "English",

volume = "298",

pages = "276--280",

journal = "Journal of Crystal Growth",

issn = "1873-5002",

publisher = "Elsevier",

}

TY - JOUR

T1 - Reduction of threading dislocation density in A1_(0.12)Ga_(0.88)N epilayers by a multistep technique

AU - Lang, Teemu

AU - Odnoblydov, Maxim

AU - Bougrov, Vladislav

AU - Suihkonen, Sami

AU - Svensk, Olli

AU - Törmä, Pekka

AU - Sopanen, Markku

AU - Lipsanen, Harri

PY - 2007

Y1 - 2007

KW - A1GaN

KW - MOCVD

KW - nucleation

KW - threading dislocations

KW - A1GaN

KW - MOCVD

KW - nucleation

KW - threading dislocations

KW - A1GaN

KW - MOCVD

KW - nucleation

KW - threading dislocations

M3 - Article

SN - 1873-5002

VL - 298

SP - 276

EP - 280

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

ER -