Reducing the Effect of Parasitic Capacitance on MEMS Measurements

P. Rantakari, J. Kiihamaki, Mika Koskenvuori, T. Lamminmäki, I. Tittonen

Research output: Working paperProfessional

Original languageEnglish
Pages1556-1559
Publication statusPublished - 2001
MoE publication typeD4 Published development or research report or study

Publication series

NameTransducers '01, Eurosensors XV, Munich, Germany, June 10-14, 2001

Keywords

  • differential amplifier
  • miceomechanical resonator
  • parasitic capasitance

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