Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition

R. L. Puurunen*, A. Häärä, H. Saloniemi, J. Dekker, M. Kainlauri, H. Pohjonen, T. Suni, J. Kiihamäki, E. Santala, M. Leskelä, H. Kattelus

*Corresponding author for this work

Research output: Contribution to journalArticleScientificpeer-review

12 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Reducing stiction in microelectromechanical systems by rough nanometer-scale films grown by atomic layer deposition'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds