@article{aae9893b97804939be1f68f3e821bea9,
title = "Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition",
keywords = "Guided wave applications, Integrated optics materials, Nanostructure fabrication, Roughness, Waveguides, Guided wave applications, Integrated optics materials, Nanostructure fabrication, Roughness, Waveguides, Guided wave applications, Integrated optics materials, Nanostructure fabrication, Roughness, Waveguides",
author = "Tapani Alasaarela and D Korn and Luca Alloatti and Antti S{\"a}yn{\"a}tjoki and Ari Tervonen and R Palmer and J Leuthold and W Freude and Seppo Honkanen",
year = "2011",
doi = "10.1364/OE.19.011529",
language = "English",
volume = "19",
pages = "11529--11538",
journal = "Optics Express",
publisher = "Optica Publishing Group",
number = "12",
}