Reduced propagation loss in silicon strip and slot waveguides coated by atomic layer deposition

Tapani Alasaarela, D Korn, Luca Alloatti, Antti Säynätjoki, Ari Tervonen, R Palmer, J Leuthold, W Freude, Seppo Honkanen

    Research output: Contribution to journalArticleScientificpeer-review

    94 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)11529-11538
    JournalOptics Express
    Volume19
    Issue number12
    DOIs
    Publication statusPublished - 2011
    MoE publication typeA1 Journal article-refereed

    Keywords

    • Guided wave applications
    • Integrated optics materials
    • Nanostructure fabrication
    • Roughness
    • Waveguides

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