Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry

A. Huttunen, I. Kallioniemi, J. Saarinen

Research output: Working paper › Professional

Original language	English
Place of Publication	Stockholm
Pages	118
Publication status	Published - 2000
MoE publication type	D4 Published development or research report or study

Name	Northern Optics 2000, Uppsala, Sweden, June 6-8, 2000
Publisher	Swedish Optical Society

Keywords

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title = "Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry",

keywords = "optical scatterometry, optical scatterometry, optical scatterometry",

author = "A. Huttunen and I. Kallioniemi and J. Saarinen",

year = "2000",

language = "English",

series = "Northern Optics 2000, Uppsala, Sweden, June 6-8, 2000",

publisher = "Swedish Optical Society",

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TY - UNPB

T1 - Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry

AU - Huttunen, A.

AU - Kallioniemi, I.

AU - Saarinen, J.

PY - 2000

Y1 - 2000

KW - optical scatterometry

M3 - Working paper

T3 - Northern Optics 2000, Uppsala, Sweden, June 6-8, 2000

SP - 118

BT - Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry

CY - Stockholm

ER -