Reconstruction of Continuous-Profile Blazed Gratings with Optical Scatterometry

A. Huttunen, I. Kallioniemi, J. Saarinen

Research output: Working paperProfessional

Original languageEnglish
Place of PublicationStockholm
Pages118
Publication statusPublished - 2000
MoE publication typeD4 Published development or research report or study

Publication series

NameNorthern Optics 2000, Uppsala, Sweden, June 6-8, 2000
PublisherSwedish Optical Society

Keywords

  • optical scatterometry

Cite this