Recent Research Progress of Carbon Nanotube Arrays Prepared by Plasma Enhanced Chemical Vapor Deposition Method

Erxiong Ding; Hong Zhang Geng; Li-He  Mao; Wen Yi Wang; Yan  Wang; Zhi Jia Luo; Jing  Wang; Hai-Jie Yang

doi:10.4028/www.scientific.net/MSF.852.308

Recent Research Progress of Carbon Nanotube Arrays Prepared by Plasma Enhanced Chemical Vapor Deposition Method

Erxiong Ding, Hong Zhang Geng, Li-He Mao, Wen Yi Wang, Yan Wang, Zhi Jia Luo, Jing Wang, Hai-Jie Yang

Not published at Aalto University

Research output: Contribution to journal › Article › Scientific › peer-review

Abstract

Preparing carbon nanotube (CNT) arrays by plasma enhanced chemical vapor deposition (PECVD) method can dramatically reduce the deposition temperature, which makes it possible for in-situ fabrication of CNT-based nanoelectronic devices. In this paper, up to date research progress of CNT arrays prepared by PECVD method was presented, including radio frequency PECVD, direct current PECVD and microwave PECVD. Then, morphology and quality of CNT arrays were compared. In the end, we analyzed the possible challenges encountered through CNT array preparation by PECVD method at the moment and in the future.

Original language	English
Pages (from-to)	308-314
Journal	Materials Science Forum
Volume	852
DOIs	https://doi.org/10.4028/www.scientific.net/MSF.852.308
Publication status	Published - Dec 2015
MoE publication type	A1 Journal article-refereed

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@article{a7ab19bb36ad45dc8e4315aba1f29718,

title = "Recent Research Progress of Carbon Nanotube Arrays Prepared by Plasma Enhanced Chemical Vapor Deposition Method",

abstract = "Preparing carbon nanotube (CNT) arrays by plasma enhanced chemical vapor deposition (PECVD) method can dramatically reduce the deposition temperature, which makes it possible for in-situ fabrication of CNT-based nanoelectronic devices. In this paper, up to date research progress of CNT arrays prepared by PECVD method was presented, including radio frequency PECVD, direct current PECVD and microwave PECVD. Then, morphology and quality of CNT arrays were compared. In the end, we analyzed the possible challenges encountered through CNT array preparation by PECVD method at the moment and in the future.",

author = "Erxiong Ding and Geng, {Hong Zhang} and Li-He Mao and Wang, {Wen Yi} and Yan Wang and Luo, {Zhi Jia} and Jing Wang and Hai-Jie Yang",

year = "2015",

month = dec,

doi = "10.4028/www.scientific.net/MSF.852.308",

language = "English",

volume = "852",

pages = "308--314",

journal = "Materials Science Forum",

issn = "0255-5476",

publisher = "TRANS TECH PUBLICATIONS",

}

Recent Research Progress of Carbon Nanotube Arrays Prepared by Plasma Enhanced Chemical Vapor Deposition Method. / Ding, Erxiong; Geng, Hong Zhang; Mao, Li-He ; Wang, Wen Yi; Wang, Yan ; Luo, Zhi Jia; Wang, Jing ; Yang, Hai-Jie.

In: Materials Science Forum, Vol. 852, 12.2015, p. 308-314.

Research output: Contribution to journal › Article › Scientific › peer-review

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AU - Ding, Erxiong

AU - Geng, Hong Zhang

AU - Mao, Li-He

AU - Wang, Wen Yi

AU - Wang, Yan

AU - Luo, Zhi Jia

AU - Wang, Jing

AU - Yang, Hai-Jie

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UR - http://www.scientific.net/MSF.852.308

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JF - Materials Science Forum

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