Recent Research Progress of Carbon Nanotube Arrays Prepared by Plasma Enhanced Chemical Vapor Deposition Method

Erxiong Ding, Hong Zhang Geng, Li-He Mao, Wen Yi Wang, Yan Wang, Zhi Jia Luo, Jing Wang, Hai-Jie Yang

Research output: Contribution to journalArticleScientificpeer-review

Abstract

Preparing carbon nanotube (CNT) arrays by plasma enhanced chemical vapor deposition (PECVD) method can dramatically reduce the deposition temperature, which makes it possible for in-situ fabrication of CNT-based nanoelectronic devices. In this paper, up to date research progress of CNT arrays prepared by PECVD method was presented, including radio frequency PECVD, direct current PECVD and microwave PECVD. Then, morphology and quality of CNT arrays were compared. In the end, we analyzed the possible challenges encountered through CNT array preparation by PECVD method at the moment and in the future.
Original languageEnglish
Pages (from-to)308-314
JournalMaterials Science Forum
Volume852
DOIs
Publication statusPublished - Dec 2015
MoE publication typeA1 Journal article-refereed

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