Reactions of Cp2ZrCl2 with Porous SiO2 Surface

M. Kröger-Laukkanen; M. Peussa; L. Niinistö

Reactions of Cp2ZrCl2 with Porous SiO2 Surface

M. Kröger-Laukkanen
, M. Peussa
, L. Niinistö

Research output: Working paper › Professional

Original language	English
Pages	p. P11
Publication status	Published - 1998
MoE publication type	D4 Published development or research report or study

Publication series

Name	First International Conference on Inorganic Materials, Paris, France, September 16-19, 1998

Keywords

ale
atomic layer epitaxy
metallocene
porous SiO2
zirconium

Cite this

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title = "Reactions of Cp2ZrCl2 with Porous SiO2 Surface",

keywords = "ale, atomic layer epitaxy, metallocene, porous SiO2, zirconium, ale, atomic layer epitaxy, metallocene, porous SiO2, zirconium, ale, atomic layer epitaxy, metallocene, porous SiO2, zirconium",

author = "M. Kr{\"o}ger-Laukkanen and M. Peussa and L. Niinist{\"o}",

year = "1998",

language = "English",

series = "First International Conference on Inorganic Materials, Paris, France, September 16-19, 1998",

pages = "p. P11",

type = "WorkingPaper",

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TY - UNPB

T1 - Reactions of Cp2ZrCl2 with Porous SiO2 Surface

AU - Kröger-Laukkanen, M.

AU - Peussa, M.

AU - Niinistö, L.

PY - 1998

Y1 - 1998

KW - ale

KW - atomic layer epitaxy

KW - metallocene

KW - porous SiO2

KW - zirconium

KW - ale

KW - atomic layer epitaxy

KW - metallocene

KW - porous SiO2

KW - zirconium

KW - ale

KW - atomic layer epitaxy

KW - metallocene

KW - porous SiO2

KW - zirconium

M3 - Working paper

T3 - First International Conference on Inorganic Materials, Paris, France, September 16-19, 1998

SP - p. P11

BT - Reactions of Cp2ZrCl2 with Porous SiO2 Surface

ER -