Rate-equation study of nucleation and growth of thin films. I. Growth of one monolayer

The kinetics of nucleation and growth of thin films is investigated using phenomenological rate equations modified from the equations by Venables (Ref. 6). These consist of coupled first-order differential equations for single adatom density, stable-cluster density, and the fractional coverage of a layer. The rate of evolution of single adatom density on a substrate is governed by the flux of adatoms, the rates of desorption and adsorption of a single adatom, and incorporation of adatoms with other adatoms or with a stable cluster. This approach serves as a basis for a rate-equation model to describe multilayer growth. The effect of impurities is also discussed.