Radio Frequency Silicon MEMS: MHz-range Resonators and Reconfigurable Millimeter-Wave Surfaces

Nikolai Chekurov, Ilkka Tittonen, Joachim Oberhammer

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

Original languageEnglish
Title of host publication47th annual conference of the Finnish Physical Society (Physics Days 2013), Espoo, Finland, March 14-16, 2013
Publication statusPublished - 2013
MoE publication typeB3 Non-refereed conference publication

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