Radio Frequency Silicon MEMS: MHz-range Resonators and Reconfigurable Millimeter-Wave Surfaces

Nikolai Chekurov, Ilkka Tittonen, Joachim Oberhammer

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

Original language	English
Title of host publication	47th annual conference of the Finnish Physical Society (Physics Days 2013), Espoo, Finland, March 14-16, 2013
Publication status	Published - 2013
MoE publication type	B3 Non-refereed article in conference proceedings

OpenUrl availability

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title = "Radio Frequency Silicon MEMS: MHz-range Resonators and Reconfigurable Millimeter-Wave Surfaces",

author = "Nikolai Chekurov and Ilkka Tittonen and Joachim Oberhammer",

year = "2013",

language = "English",

booktitle = "47th annual conference of the Finnish Physical Society (Physics Days 2013), Espoo, Finland, March 14-16, 2013",

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47th annual conference of the Finnish Physical Society (Physics Days 2013), Espoo, Finland, March 14-16, 2013. 2013.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific

TY - GEN

T1 - Radio Frequency Silicon MEMS: MHz-range Resonators and Reconfigurable Millimeter-Wave Surfaces

AU - Chekurov, Nikolai

AU - Tittonen, Ilkka

AU - Oberhammer, Joachim

PY - 2013

Y1 - 2013

UR - http://physics.aalto.fi/pub/fp2013/absfiles/1065.pdf

M3 - Conference contribution

BT - 47th annual conference of the Finnish Physical Society (Physics Days 2013), Espoo, Finland, March 14-16, 2013

ER -