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Quantitative copper measurement in oxidized p-type silicon wafers using microwave photoconductivity decay
Hele Väinölä, E Saarnilehto, M. Yli-Koski, A. Haarahiltunen, J. Sinkkonen, G. Berenyi, Tibor Pavelka
Research output: Contribution to journal › Article › Scientific › peer-review
20
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(Scopus)