Quantifying the Impact of Al Deposition Method on Underlying Al2O3/Si Interface Quality

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COLO: Elimination of contact losses in semiconductors through atomic-scale interface research and engineering
Savin, H. (Principal investigator), Liu, H. (Project Member), Morozova, O. (Project Member), Matilainen, M. (Project Member), Timperi, I. (Project Member), Lahtiluoma, L. (Project Member), Yli-Koski, M. (Project Member), Gosalvez, S. (Project Member), Setälä, O. (Project Member), Vähänissi, V. (Project Member), Chen, K. (Project Member), Sutinen, K. (Project Member), Räisänen, S. (Project Member), Suihkonen, S. (Project Member) & Isometsä, J. (Project Member)
01/09/2021 → 31/08/2025
Project: RCF Academy Project
NIR: Super-sensitive ?/X- and NIR-radiation detectors via defect-free nanostructures: Next Imaging Revolution?
Vähänissi, V. (Principal investigator), Gosalvez, S. (Project Member), Ayedh, H. (Project Member), Lahtiluoma, L. (Project Member), Terletskaia, M. (Project Member), Leiviskä, O. (Project Member), Suolinna, J. (Project Member), Radfar, B. (Project Member), Räisänen, S. (Project Member), Setälä, O. (Project Member) & Liu, H. (Project Member)
01/09/2020 → 31/08/2024
Project: RCF Academy Project
SISUPROCO: Silicon Surface Processing Commercialization
Savin, H. (Principal investigator), Vähänissi, V. (Project Member), Parkkila, A. (Project Member), Rosta, K. (Project Member) & Mack, I. (Project Member)
01/06/2018 → 31/12/2019
Project: Business Finland: Other research funding

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