Quantifying the Impact of Al Deposition Method on Underlying Al2O3/Si Interface Quality
- Iris Mack*
- , Kawa Rosta
- , Ulviyya Quliyeva
- , Jennifer Ott
- , Toni Pasanen
- , Ville Vähänissi
- , Zahra Jahanshah Rad
- , Juha Pekka Lehtiö
- , Pekka Laukkanen
- , Caterina Soldano
- , Hele Savin
*Corresponding author for this work
- University of Helsinki
- University of Turku
Research output: Contribution to journal › Article › Scientific › peer-review
5
Citations
(Scopus)
79
Downloads
(Pure)