Quantifying the Impact of Al Deposition Method on Underlying Al2O3/Si Interface Quality

Iris Mack*, Kawa Rosta, Ulviyya Quliyeva, Jennifer Ott, Toni Pasanen, Ville Vähänissi, Zahra Jahanshah Rad, Juha Pekka Lehtiö, Pekka Laukkanen, Caterina Soldano, Hele Savin

*Corresponding author for this work

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Physics

Material Science