Quantification of antimony depth profiles in Sb-doped tin dioxide thin films

S. Lehto, R. Lappalainen, H. Viirola, L. Niinistö

    Research output: Contribution to journalArticleScientificpeer-review

    11 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)129-134
    JournalFresenius' Journal of Analytical Chemistry
    Volume355
    Publication statusPublished - 1996
    MoE publication typeA1 Journal article-refereed

    Keywords

    • ale
    • antimony
    • atomic layer epitaxy
    • sims
    • tin dioxide

    Cite this