Quality Factor and Resonance Frequency Shift due to Air in RF MEMS Radial Disk Resonators

Timo Veijola

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    10 Citations (Scopus)
    Original languageEnglish
    Title of host publicationThe 14th International Conference on Solid-State Sensors, Actuators and Microsystems, Lyon, France, June 10-14,2007
    Place of PublicationLyon, France
    PublisherIEEE
    Pages643-646
    ISBN (Print)1-4244-0841-5
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Keywords

    • Damping
    • Disk resonator
    • RF MEMS
    • Squeeze-film damping

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