Pyrazolate-based precursors for the growth of thin films by atomic layer deposition

Charles J. Winter, Charles L. Dezelah, Monika K. Wiedmann, Mark J. Saly, Lauri Niinistö

    Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

    Original languageEnglish
    Title of host publication234th ACS National Meeting, Boston, MA, United States, August 19-23, 2007
    PagesINOR-351
    Publication statusPublished - 2007
    MoE publication typeA4 Article in a conference publication

    Cite this