Pyrazolate-based precursors for the growth of thin films by atomic layer deposition

Charles J. Winter, Charles L. Dezelah, Monika K. Wiedmann, Mark J. Saly, Lauri Niinistö

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review

Original language	English
Title of host publication	234th ACS National Meeting, Boston, MA, United States, August 19-23, 2007
Pages	INOR-351
Publication status	Published - 2007
MoE publication type	A4 Article in a conference publication

Cite this

@inproceedings{f3bb514701ef4c5088a03fd656b5edfd,

title = "Pyrazolate-based precursors for the growth of thin films by atomic layer deposition",

author = "Winter, {Charles J.} and Dezelah, {Charles L.} and Wiedmann, {Monika K.} and Saly, {Mark J.} and Lauri Niinist{\"o}",

year = "2007",

language = "English",

pages = "INOR--351",

booktitle = "234th ACS National Meeting, Boston, MA, United States, August 19-23, 2007",

}

Pyrazolate-based precursors for the growth of thin films by atomic layer deposition. / Winter, Charles J.; Dezelah, Charles L.; Wiedmann, Monika K.; Saly, Mark J.; Niinistö, Lauri.

234th ACS National Meeting, Boston, MA, United States, August 19-23, 2007. 2007. p. INOR-351.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Scientific › peer-review