Pushing the limits of plasma ALD conformality

Matti Putkonen, M. Kariniemi, J. Niinistö, M. Vehkamäki, M. Kemell, M. Ritala, M. Leskelä, E.J. Karwacki, I. Buchanan

    Research output: Working paperProfessional

    Original languageEnglish
    Publication statusPublished - 2011
    MoE publication typeD4 Published development or research report or study

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