| Original language | English |
|---|---|
| Publication status | Published - 2011 |
| MoE publication type | D4 Published development or research report or study |
Pushing the limits of plasma ALD conformality
Matti Putkonen, M. Kariniemi, J. Niinistö, M. Vehkamäki, M. Kemell, M. Ritala, M. Leskelä, E.J. Karwacki, I. Buchanan
Research output: Working paper › Professional