Pulse-frequency-modulated high-frequency-carrier diffractive elements for pattern projection
Research output: Contribution to journal › Article › Scientific › peer-review
- University of Jyväskylä
An efficient two-stage algorithm is presented for the synthesis of high-frequency-carrier diffractive elements. First, an on-axis phase-only stripe-geometry element with an unconstrained profile along each stripe is designed by an iterative Fourier transform algorithm. In the second stage, a steep linear phase term is added, and the profile is hard- clipped along each stripe. The result is a binary, pulse-frequency-modulated element suitable, e.g., for a resonance-domain realization, which permits the elimination of the twin image. Experimental results are provided by direct-write electron-beam lithography and optical lithography, using both fully and partially coherent illumination.
|Number of pages||9|
|Publication status||Published - 1 Aug 1994|
|MoE publication type||A1 Journal article-refereed|
- diffraction, gratings, lithography