Pulsed laser deposition using diffractively shaped excimer-laser Beams

Ville Kekkonen, Antti Hakola, Jari Likonen, Yanling Ge, Timo Kajava

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)423-443
JournalAPPLIED PHYSICS A-MATERIALS SCIENCE AND PROCESSING
Volume108
Issue number2
DOIs
Publication statusPublished - 2012
MoE publication typeA1 Journal article-refereed

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