Properties of Silicon Nanopillar Structure

Charlotta Tuovinen, Alexei Malinin, Victor Ovchinnikov, Tero Toivola

Research output: Contribution to journalArticleScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)125-128
JournalPhysica Scripta
Issue numberT101
Publication statusPublished - 2002
MoE publication typeA1 Journal article-refereed

Keywords

  • nanopillar
  • silicon

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