Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

Research output: Contribution to journalArticleScientificpeer-review

Researchers

Research units

  • Beneq Oy

Details

Original languageEnglish
Pages (from-to)570-574
Number of pages5
JournalApplied Surface Science
Volume314
Publication statusPublished - 30 Sep 2014
MoE publication typeA1 Journal article-refereed

ID: 957613